Sputtering of Metals with Low-Energy Inert Gas Ions:...

Sputtering of Metals with Low-Energy Inert Gas Ions: Possible Influence of Trapped Gas

Sinha, M. K.
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Volume:
39
Year:
1968
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1656508
File:
PDF, 491 KB
english, 1968
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