Growth of Al and Al nitride films in N2–Ne and N2–(Ne+Ar)...

Growth of Al and Al nitride films in N2–Ne and N2–(Ne+Ar) discharges: Construction of a ternary gas phase diagram

Siettmann, James R.
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Volume:
6
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.575276
Date:
May, 1988
File:
PDF, 633 KB
english, 1988
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