Generation of uniform large-area very high frequency...

Journal of Applied Physics 2014 / 09 Vol. 116; Iss. 10

Generation of uniform large-area very high frequency plasmas by launching two specific standing waves simultaneously

Chen, Hsin-Liang, Tu, Yen-Cheng, Hsieh, Cheng-Chang, Lin, Deng-Lain, Leou, Keh-Chyang
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Volume:
116
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4895703
Date:
September, 2014
File:
PDF, 1.73 MB
english, 2014
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