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[IEEE IEEE 1988 Ultrasonics Symposium Proceedings. - Chicago, IL, USA (2-5 Oct. 1988)] IEEE 1988 Ultrasonics Symposium Proceedings. - Growth and characterization of aluminium nitride thin films for piezoelectric devices
McCarron, K.T., Kline, G.R., Martin, J.T., Lakin, K.M.Year:
1988
Language:
english
DOI:
10.1109/ultsym.1988.49462
File:
PDF, 315 KB
english, 1988