Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2012 Vol. 30; Iss. 3
Formation of mesa-type vertically aligned silicon nanowire bundle arrays by selective-area chemical oxidation and etching processes
Hung, Yung-Jr, Lee, San-Liang, Choon Beng, LooiVolume:
30
Year:
2012
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.4711000
File:
PDF, 3.43 MB
english, 2012