Enhanced oxygen out-diffusion in silicon crystal doped with...

Journal of Applied Physics 2007 Vol. 102; Iss. 6

Enhanced oxygen out-diffusion in silicon crystal doped with germanium

Chen, Jiahe, Yang, Deren, Ma, Xiangyang, Fan, Ruixin, Que, Duanlin
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Volume:
102
Year:
2007
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.2781408
File:
PDF, 546 KB
english, 2007
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