Silicide formation and structural evolution in Fe-, Co-,...

Silicide formation and structural evolution in Fe-, Co-, and Ni-implanted silicon

Tan, Zhengquan, Namavar, F., Budnick, J. I., Sanchez, F. H., Fasihuddin, A., Heald, S. M., Bouldin, C. E., Woicik, J. C.

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Volume:

Language:

english

Journal:

Physical Review B

DOI:

10.1103/PhysRevB.46.4077

Date:

August, 1992

File:

PDF, 455 KB

english, 1992

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