Optical thickness profiling using a semiconductor laser...

Optical thickness profiling using a semiconductor laser confocal microscope

Saloma, Caesar, Matsuoka, Katsunori, Kawata, Satoshi
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Volume:
67
Year:
1996
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.1147017
File:
PDF, 420 KB
english, 1996
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