A microfabricated sensor for thin dielectric layers
Fierlinger, P., DeVoe, R., Flatt, B., Gratta, G., Green, M., Kolkowitz, S., Leport, F., Montero Diez, M., Neilson, R., O’Sullivan, K., Pocar, A., Wodin, J.Volume:
79
Year:
2008
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.2906402
File:
PDF, 827 KB
english, 2008