Compositional dependence of trap density and origin in thin silicon oxynitride film investigated using spin dependent Poole–Frenkel current
Yonamoto, Yoshiki, Inaba, Yutaka, Akamatsu, NaotoshiVolume:
98
Year:
2011
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.3598393
File:
PDF, 572 KB
english, 2011