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Analysis of a CF4/O2 plasma using emission, laser-induced fluorescence, mass, and Langmuir spectroscopy
Buchmann, L.-M., Heinrich, F., Hoffmann, P., Janes, J.Volume:
67
Year:
1990
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.345317
File:
PDF, 872 KB
english, 1990