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Characteristics of altered layers formed by sputtering with a massive molecular ion containing diverse elements with large mass differences
Fujiwara, Yukio, Kondou, Kouji, Nonaka, Hidehiko, Saito, Naoaki, Fujimoto, Toshiyuki, Kurokawa, Akira, Ichimura, Shingo, Tomita, MitsuhiroVolume:
102
Year:
2007
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.2786906
File:
PDF, 398 KB
english, 2007