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The effect of thermal treatment induced inter-diffusion at the interfaces on the charge trapping performance of HfO2/Al2O3 nanolaminate-based memory devices
Lan, Xuexin, Ou, Xin, Cao, Yanqiang, Tang, Shiyu, Gong, Changjie, Xu, Bo, Xia, Yidong, Yin, Jiang, Li, Aidong, Yan, Feng, Liu, ZhiguoVolume:
114
Year:
2013
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4816463
File:
PDF, 2.86 MB
english, 2013