Dry-etch of As[sub 2]S[sub 3] thin films for optical waveguide fabrication
Li, Weitang, Ruan, Yinlan, Luther-Davies, Barry, Rode, Andrei, Boswell, RodVolume:
23
Year:
2005
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.2049308
File:
PDF, 493 KB
english, 2005