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Microstructure of plasma-deposited SiO[sub 2]/TiO[sub 2] optical films
Larouche, Stéphane, Szymanowski, Hieronim, Klemberg-Sapieha, Jolanta E., Martinu, Ludvik, Gujrathi, Subhash C.Volume:
22
Year:
2004
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1763912
File:
PDF, 415 KB
english, 2004