Interfacial oxide growth at silicon∕high-k oxide interfaces: First principles modeling of the Si–HfO[sub 2] interface
Hakala, M. H., Foster, A. S., Gavartin, J. L., Havu, P., Puska, M. J., Nieminen, R. M.Volume:
100
Year:
2006
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.2259792
File:
PDF, 1.06 MB
english, 2006