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Atomic layer deposition of Pt growth template for orienting PbZrxTi1−xO3 thin films
Potrepka, Daniel M., Sanchez, Luz M., Polcawich, Ronald G.Volume:
30
Year:
2012
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.3664766
File:
PDF, 1.47 MB
english, 2012