A 3-dimensional model for low-pressure...

A 3-dimensional model for low-pressure chemical-vapor-deposition step coverage in trenches and circular vias

IslamRaja, M. Mazhar, Cappelli, M. A., McVittie, J. P., Saraswat, K. C.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
70
Year:
1991
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.349797
File:
PDF, 765 KB
english, 1991
Conversion to is in progress
Conversion to is failed