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[IEEE 2010 IEEE International Frequency Control Symposium (FCS) - Newport Beach, CA, USA (2010.06.1-2010.06.4)] 2010 IEEE International Frequency Control Symposium - Thin-film piezoelectric-on-silicon particle mass sensors
Harrington, Brandon P., Abdolvand, Reza, Hajjam, Arash, Wilson, James C., Pourkamali, SiavashYear:
2010
Language:
english
DOI:
10.1109/freq.2010.5556336
File:
PDF, 1.99 MB
english, 2010