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[IEEE 1994 VLSI Technology Symposium - Honolulu, HI, USA (7-9 June 1994)] Proceedings of 1994 VLSI Technology Symposium - A memory cell capacitor with Ba/sub x/Sr/sub 1-x/TiO/sub 3/ (BST) film for advanced DRAMs
Ohno, Y., Horikawa, T., Shinkawata, H., Kashihara, K., Kuroiwa, T., Okudaira, T., Hashizume, Y., Fukumoto, K., Eimori, T., Shibano, T., Arimoto, K., Itoh, H., Nishimura, T., Miyoshi, H.Year:
1994
Language:
english
DOI:
10.1109/vlsit.1994.324413
File:
PDF, 187 KB
english, 1994