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[IEEE 2008 International Conference on Control, Automation and Systems (ICCAS) - Seoul, South Korea (2008.10.14-2008.10.17)] 2008 International Conference on Control, Automation and Systems - A non-contact temperature measurement of semitransparent silicon wafers with absorption edge wavelength
Iuchi, Tohru, Shinagawa, RyoYear:
2008
Language:
english
DOI:
10.1109/iccas.2008.4694630
File:
PDF, 894 KB
english, 2008