Etching of organosilicate glass low-k dielectric films in...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2002 Vol. 20; Iss. 3

Etching of organosilicate glass low-k dielectric films in halogen plasmas

Vitale, Steven A., Sawin, Herbert H.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
20
Year:
2002
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1460891
File:
PDF, 440 KB
english, 2002
Conversion to is in progress
Conversion to is failed