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Mass and Auger electron spectroscopy studies of the interactions of atomic and molecular chlorine on a plasma reactor wall
Guha, Joydeep, Donnelly, Vincent M., Pu, Yi-KangVolume:
103
Year:
2008
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.2828154
File:
PDF, 1.54 MB
english, 2008