〈100〉-textured self-assembled square-shaped polycrystalline silicon grains by multiple shot excimer laser crystallization
He, Ming, Ishihara, Ryoichi, Metselaar, Wim, Beenakker, KeesVolume:
100
Year:
2006
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.2358405
File:
PDF, 824 KB
english, 2006