Polysilicon transistors on glass by pulsed-laser annealing

Polysilicon transistors on glass by pulsed-laser annealing

Morin, F.
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Volume:
53
Year:
1982
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.331094
File:
PDF, 467 KB
english, 1982
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