[IEEE 2014 IEEE 11th International Conference on Semiconductor Electronics (ICSE) - Kuala Lumpur, Malaysia (2014.8.27-2014.8.29)] 2014 IEEE International Conference on Semiconductor Electronics (ICSE2014) - Structural damage of Si-implanted in the In0.53Ga0.47As thin film
Roslan, Muhammad Zulkhairi, Berhanuddin, Dilla D., Mohamed, Mohd Ambri, Wee, M.F. Mohd Razip, Larki, Farhad, Majlis, Burhanuddin YeopYear:
2014
Language:
english
DOI:
10.1109/smelec.2014.6920842
File:
PDF, 1.43 MB
english, 2014