[IEEE Proceedings., Sixth International IEEE VLSI Multilevel Interconnection Conference - Santa Clara, CA, USA (12-13 June 1989)] Proceedings., Sixth International IEEE VLSI Multilevel Interconnection Conference - Stress migration resistance of Al-Si-Pd alloy interconnects
Koubuchi, Y., Onuki, J., Suwa, M., Fukada, S.Year:
1989
Language:
english
DOI:
10.1109/vmic.1989.78003
File:
PDF, 534 KB
english, 1989