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[IEEE IEEE Conference Record - Abstracts. 1997 IEEE International Conference on Plasma Science - San Diego, CA, USA (19-22 May 1997)] IEEE Conference Record - Abstracts. 1997 IEEE International Conference on Plasma Science - Low-temperature deposition pathways to silicon nitride, amorphous silicon, polycrystalline silicon, and n type amorphous silicon films using a high density plasma system
Sanghoon Bae,, Farber, D., Kalkan, A., Fonash, S.Year:
1997
Language:
english
DOI:
10.1109/plasma.1997.605152
File:
PDF, 114 KB
english, 1997