![](/img/cover-not-exists.png)
An atomic layer deposition chamber for in situ x-ray diffraction and scattering analysis
Geyer, Scott M., Methaapanon, Rungthiwa, Johnson, Richard W., Kim, Woo-Hee, Van Campen, Douglas G., Metha, Apurva, Bent, Stacey F.Volume:
85
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.4876484
Date:
May, 2014
File:
PDF, 1.49 MB
english, 2014