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He induced nanovoids for point-defect engineering in B-implanted crystalline Si
Bruno, E., Mirabella, S., Priolo, F., Napolitani, E., Bongiorno, C., Raineri, V.Volume:
101
Year:
2007
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.2427101
File:
PDF, 467 KB
english, 2007