Preparation and stability of low temperature cobalt and...

Preparation and stability of low temperature cobalt and nickel silicides on thin polysilicon films

Howell, R. S., Sarcona, G., Saha, S. K., Hatalis, M. K.
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Volume:
18
Year:
2000
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.582123
File:
PDF, 374 KB
english, 2000
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