Nonlinear enhancement of plasma density in linear combination of multiple collisional internal inductively coupled plasma sources
Chen, Zhipeng, Li, Hong, Li, Bin, Luo, Chen, Xie, Jinlin, Liu, WandongVolume:
17
Year:
2010
Language:
english
Journal:
Physics of Plasmas
DOI:
10.1063/1.3486200
File:
PDF, 1.27 MB
english, 2010