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Effects of laser-induced heating on Raman stress measurements of silicon and silicon-germanium structures
Georgi, Carsten, Hecker, Michael, Zschech, EhrenfriedVolume:
101
Year:
2007
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.2743882
File:
PDF, 475 KB
english, 2007