Active low temperature oxidation as a route to minimize electrode–oxide interface reactions in nanoscale capacitors
Podpirka, Adrian, Viswanath, B., Ramanathan, ShriramVolume:
108
Year:
2010
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.3456446
File:
PDF, 1.55 MB
english, 2010