[IEEE 2013 Joint European Frequency and Time Forum & International Frequency Control Symposium (EFTF/IFC) - Prague, Czech Republic (2013.07.21-2013.07.25)] 2013 Joint European Frequency and Time Forum & International Frequency Control Symposium (EFTF/IFC) - Piezoelectric and electroacoustic properties of V-doped and Ta-doped AlN thin films

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