[IEEE 2009 IEEE 22nd International Conference on Micro...

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[IEEE 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems (MEMS) - Sorrento, Italy (2009.01.25-2009.01.29)] 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems - Towards Piezoresistive CMOS Sensors for Out-of-Plane Stress

Lemke, B., Kratt, K., Baskaran, R., Paul, O.
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Year:
2009
Language:
english
DOI:
10.1109/memsys.2009.4805499
File:
PDF, 4.57 MB
english, 2009
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