[IEEE IEEE Conference Record - Abstracts. 2005 IEEE International Conference on Plasma Science - Monterey, CA, USA (2005.06.20-2005.06.23)] IEEE Conference Record - Abstracts. 2005 IEEE International Conference on Plasma Science - Surface Modification of Polyimide Films by DBD Atmospheric Pressure Plasma for Copper Metallization
Choi, Yoon-Ho, Kim, Ji-Hun, Hwang, Yong-SeokYear:
2005
Language:
english
DOI:
10.1109/plasma.2005.359287
File:
PDF, 1.07 MB
english, 2005