A low-energy reactive-ion gun using an ECR ion source and...

Review of Scientific Instruments 1992 Vol. 63; Iss. 3

A low-energy reactive-ion gun using an ECR ion source and acceleration-deceleration system

Tanaka, Tohru, Maruo, Tesuya, Higashi, Yasuhiro, Homma, Yoshikazu
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Volume:
63
Year:
1992
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.1143310
File:
PDF, 807 KB
english, 1992
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