Network compaction and surface deformation in the...

Network compaction and surface deformation in the hydrogenated silicon nitride film upon soft x-ray/VUV illumination

Modi, Mohammed H., Lodha, G. S., Srivastava, P., Sinha, A. K., Nandedkar, R. V.
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Volume:
74
Language:
english
Journal:
Physical Review B
DOI:
10.1103/PhysRevB.74.045326
Date:
July, 2006
File:
PDF, 727 KB
english, 2006
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