Gettering of Cu by microcavities in bonded/ion-cut...

Gettering of Cu by microcavities in bonded/ion-cut silicon-on-insulator and separation by implantation of oxygen

Zhang, Miao, Zeng, Xuchu, Chu, Paul K., Scholz, R., Lin, Chenglu
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Volume:
86
Year:
1999
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.371348
File:
PDF, 873 KB
english, 1999
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