Gettering of Cu by microcavities in bonded/ion-cut silicon-on-insulator and separation by implantation of oxygen
Zhang, Miao, Zeng, Xuchu, Chu, Paul K., Scholz, R., Lin, ChengluVolume:
86
Year:
1999
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.371348
File:
PDF, 873 KB
english, 1999