Formation of periodic step and terrace structure on Si(100) surface during annealing in hydrogen diluted with inert gas
Kumagai, Y.Volume:
16
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.581301
Date:
May, 1998
File:
PDF, 595 KB
english, 1998