11–13 GHz electron cyclotron resonance plasma source using...

Review of Scientific Instruments 2006 Vol. 77; Iss. 11

11–13 GHz electron cyclotron resonance plasma source using cylindrically comb-shaped magnetic-field configuration for broad ion-beam processing

Asaji, Toyohisa, Kato, Yushi, Sato, Fuminobu, Iida, Toshiyuki, Saito, Junji
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Volume:
77
Year:
2006
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.2387885
File:
PDF, 405 KB
english, 2006
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