[IEEE 2014 25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY (2014.5.19-2014.5.21)] 25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2014) - Progress on background signal analysis of bare wafer inspection systems based on light scattering for III/V epitaxial growth monitoring
Halder, Sandip, Mols, Yves, van den Heuvel, Dieter, van Puymbroeck, Jan, Caymax, Matty, Vancoille, Eric, Nieuborg, Nancy, Bast, Gerhard, Simpson, Gavin, Peikert, Milko, Polli, Marco, Ulea, Neli, SeongYear:
2014
Language:
english
DOI:
10.1109/asmc.2014.6847022
File:
PDF, 486 KB
english, 2014