Ion implantation synthesis and conduction of tantalum oxide...

Ion implantation synthesis and conduction of tantalum oxide resistive memory layers

Bishop, Seann M., Briggs, Benjamin D., Rice, Phillip Z., Capulong, Jihan O., Bakhru, Hassaram, Cady, Nathaniel C.
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Volume:
31
Year:
2013
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.4771987
File:
PDF, 1.79 MB
english, 2013
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