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[IEEE 2009 34th IEEE Photovoltaic Specialists Conference (PVSC) - Philadelphia, PA, USA (2009.06.7-2009.06.12)] 2009 34th IEEE Photovoltaic Specialists Conference (PVSC) - Sulfur hexafluoride (SF6) as fluorine dopant precursor for production of fluorine doped tin oxide films by MOCVD
Wyse, Carrie, Torres, Robert, Barnes, Teresa, Scott, Marty, Young, Matt, Li, Xiaonan, Gessert, TimYear:
2009
Language:
english
DOI:
10.1109/pvsc.2009.5411291
File:
PDF, 8.59 MB
english, 2009