Interdiffusion studies for HfSi[sub x]O[sub y] and ZrSi[sub...

Journal of Applied Physics 2002 Vol. 92; Iss. 7

Interdiffusion studies for HfSi[sub x]O[sub y] and ZrSi[sub x]O[sub y] on Si

Quevedo-Lopez, M. A., El-Bouanani, M., Gnade, B. E., Wallace, R. M., Visokay, M. R., Douglas, M., Bevan, M. J., Colombo, L.
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Volume:
92
Year:
2002
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1501752
File:
PDF, 902 KB
english, 2002
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