Diagnostics of plasma emission spectra during electron assisted chemical vapor deposition of diamond films
Zhu, Xiao-Dong, Hu, Min, Zhan, Ru-Juan, Wen, Xiao-Hui, Zhou, Hai-YangVolume:
5
Year:
1998
Language:
english
Journal:
Physics of Plasmas
DOI:
10.1063/1.872812
File:
PDF, 360 KB
english, 1998