Model-dielectric-function analysis of ion-implanted Si(100) wafers
Adachi, Sadao, Mori, Hirofumi, Takahashi, MitsutoshiVolume:
93
Year:
2003
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1527215
File:
PDF, 441 KB
english, 2003