High voltage pulser with a fast fall-time for plasma...

Review of Scientific Instruments 2011 Vol. 82; Iss. 4

High voltage pulser with a fast fall-time for plasma immersion ion implantation

Zhu, Zongtao, Gong, Chunzhi, Tian, Xiubo, Yang, Shiqin, Fu, Ricky K. Y., Chu, Paul K.
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Volume:
82
Year:
2011
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.3575320
File:
PDF, 748 KB
english, 2011
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