Measurements of layer thicknesses and refractive indices in...

Journal of Applied Physics 1976 / 12 Vol. 47; Iss. 12

Measurements of layer thicknesses and refractive indices in high‐energy ion‐implanted GaAs and GaP

Kachare, A. H., Spitzer, W. G., Fredrickson, J. E., Euler, F. K.
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Volume:
47
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.322564
Date:
December, 1976
File:
PDF, 888 KB
english, 1976
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